Femtosecond laser processing of micropores in aluminum nitride ceramics

High-Precision Microhole Machining Capability
Utilizing femtosecond laser ultrashort pulse machining technology, it can achieve micron-level precision hole machining, suitable for microhole structures of 0.15mm and above, meeting the requirements of high-precision functional designs.

Excellent Hole Shape Quality and Roundness
The extremely small heat diffusion range during laser machining effectively reduces problems such as hole wall roughness and hole diameter deviation, achieving excellent hole roundness and consistency.

Low Heat-Affected Zone Machining
Femtosecond laser is a "cold working" technology, which can reduce thermal cracking, edge chipping, and material property changes during aluminum nitride ceramic machining, improving part reliability.

Suitable for High-Performance Ceramic Materials
Traditional machining methods are difficult due to the high hardness and brittleness of aluminum nitride ceramics, while femtosecond lasers can achieve complex microstructure machining.

High Dimensional Precision Control
High machining accuracy can meet the stringent dimensional requirements of precision electronic components, microfluidic structures, and functional ceramic parts.

Semiconductor manufacturing equipment

Precision ceramic positioning components
Vacuum equipment microporous components
Semiconductor process structural components

Electronic Packaging and Power Devices

Aluminum Nitride Heat Dissipation Substrates
High-Power Module Ceramic Components
Microporous Insulating Structures

Microfluidics and Precision Jetting Systems

Micro-orifice Nozzles
Precision Fluid Control Panels
Microchannel Structures

Optoelectronic and laser equipment

Precision positioning ceramic components
Optical equipment support assemblies
High-stability insulating components